Field emission device and method of making the same

Details Field emission device and method of making the same Field emission device and method of making the same

1992-11-02

1995-09-12

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566621, 1566431, 313309, H01L 2100, H01J 102, B44C 122

Patent

active

054494354

ABSTRACT:
A method for forming a field emission device. A substrate is selectively patterned. An etch is performed to remove portions of the substrate to form protrusions. An oxidation is performed to the substrate that forms a first oxidized layer. A perpendicular etch is performed that removes portions of the first oxidized layer. A second oxidation is performed to the substrate that forms a second oxidized layer. A conductive or semiconductive layer is deposited onto the second oxidized layer. An etch is performed to remove a portion of the first oxidized layer and a portion of the second oxidized layer to expose the protuberance.

REFERENCES:
patent: 3970887 (1976-07-01), Smith et al.
patent: 4168213 (1979-09-01), Hoeberechts
patent: 4964946 (1990-10-01), Gray et al.
patent: 4968382 (1990-11-01), Jacobson et al.
patent: 5064396 (1991-11-01), Spindt
patent: 5100355 (1992-03-01), Marcus et al.
patent: 5201992 (1993-04-01), Marcus et al.

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