Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1997-03-24
1998-05-26
Tran, Minh-Loan
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257350, 257377, 257382, 257903, H01L 2701
Patent
active
057570507
ABSTRACT:
Improved field effect transistor (FET) structures are described. They include a thin film transistor (TFT), wherein a contact layer directly connects a diffusion region of the TFT to an active site of another device, e.g., another transistor. This invention is especially suitable for TFT's which are built on one or more conductive studs. Static random access memory (SRAM) cells incorporating one or more of the TFT's are also described. Moreover, this invention is directed to methods for preventing or alleviating the problems associated with gouging during formation of contact layers.
REFERENCES:
patent: 5156987 (1992-10-01), Sandhu et al.
patent: 5670812 (1997-09-01), Adler et al.
Adler Eric
Kulkarni Subhash Balakrishna
Mann Randy William
Rausch Werner Alois
Ternullo, Jr. Luigi
International Business Machines - Corporation
Tran Minh-Loan
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