Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-10-17
1998-10-13
Thomas, Tom
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
H01L 2978
Patent
active
058215735
ABSTRACT:
An arched gate MOSFET having first and second source/drain regions formed spaced apart on a main surface of the semiconductor substrate, and a gate electrode formed on said main surface of the semiconductor substrate through an insulating film. The gate electrode extends in a first direction between the first and second source/drain regions defining a channel length, and in a second direction, perpendicular to the first direction, defining a channel width. The surface of the semiconductor substrate is arcuate in shape in the channel width direction and the gate electrode conforms to the arcuate shape of the surface of the semiconductor substrate.
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Schunke J. Neil
Taylor Thomas S.
Zaterka David
Hardy David B.
Mitsubishi Semiconductor America Inc.
Thomas Tom
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