Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1987-08-06
1989-10-24
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250231R, 250231P, H01J 516, G01D 534
Patent
active
048764477
ABSTRACT:
Optical interferometric techniques are used in order to measure deflection in a cantilever beam. Light is directed through plural light paths which are changed in length during deflection of the beam. The light recombines and light interferance is used to measure deflection of the beams.
REFERENCES:
patent: 4529876 (1985-07-01), Walker
patent: 4653906 (1987-03-01), Dunphy et al.
Allen Stephone B.
Allied-Signal Inc.
Massung Howard G.
Nelms David C.
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