Fiber-based optical alignment system

Details Fiber-based optical alignment system Fiber-based optical alignment system

2007-05-01

2008-05-27

Pak, Sung (Department: 2874)

Optical waveguides

With optical coupler

With alignment device

C385S049000, C385S115000

Reexamination Certificate

active

07379641

ABSTRACT:
A low-cost alignment system suitable for aligning a wafer to a test fixture includes a bundle of optical fibers wherein at least one fiber serves to deliver illumination to the alignment target from an end thereof, and a plurality of receiver fibers, each having ends with a known spatial relationship to the end of the illuminator fiber. The ends of the fiber bundle have a known spatial relationship to the fixture. In some embodiments, the fiber bundle is disposed within the fixture such that there is an unobscured optical path between the wafer and the receiving and illuminating ends of the fibers. In some embodiments, the fiber bundle is coupled to a light source and a light sensor mounted on the fixture. In some embodiments the alignment target is one or more bonding pads disposed on a wafer.

REFERENCES:
patent: 6181856 (2001-01-01), Brun
patent: 6724961 (2004-04-01), Greene et al.
patent: 6763157 (2004-07-01), Williams et al.
patent: 6792185 (2004-09-01), Ahrens et al.
patent: 6941034 (2005-09-01), Kuboi
patent: 7038191 (2006-05-01), Kare et al.

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