Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Patent
1997-06-03
1998-12-22
Ullah, Akm E.
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
505191, 257295, G02B 610
Patent
active
058527036
ABSTRACT:
The present invention is to provide a production method of a ferroelectric thin film element comprising an epitaxial ferroelectric thin film having stable composition control, an optical smoothness of the surface, and a high crystallization. In the production method, carrying out a first solid phase epitaxial growth process where a first organometallic compound is applied on the single-crystalline substrate and heated to form a ferroelectric buffer layer on a single-crystalline substrate, having a composition different from the substrate with a film thickness of 1 nm to 40 nm; carrying out at least once a second solid phase epitaxial growth process where a second organometallic compound is applied on the ferroelectric buffer layer formed in the above process and heated to form a ferroelectric single layer thin film with a film thickness of 10 nm or more, and being thicker than the ferroelectric buffer layer.
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Fuji 'Xerox Co., Ltd.
Ullah Akm E.
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