Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2005-05-10
2005-05-10
Nelms, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257SE27104
Reexamination Certificate
active
06891211
ABSTRACT:
The present invention is related to a ferroelectric memory device and a method for fabricating the same. The ferroelectric memory device includes: a substrate providing a transistor; a first insulation material with a plane surface formed on the substrate; a storage node contact passing through the first insulation material to contact to an active region of the substrate; a lower electrode being connected to the storage node contact and including a solid solution layer disposed at least as an upper most layer, the solid solution layer being doped with a metal element, which is induced to be in a solid solution state; a second insulation material having a plane surface that exposes a surface of the lower electrode, encompassing the lower electrode and being formed on the first insulation material; a ferroelectric layer covering the second insulation material including the lower electrode; an upper electrode formed on the ferroelectric layer.
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patent: 6440754 (2002-08-01), Hayashi et al.
patent: 6479849 (2002-11-01), Katori
patent: 6541375 (2003-04-01), Hayashi et al.
patent: 1998-63820 (1998-10-01), None
patent: 2001-56098 (2001-07-01), None
Choi Eun-Seok
Yeom Seung-Jin
Ho Tu-Tu
Hynix / Semiconductor Inc.
Jacobson & Holman PLLC
Nelms David
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