Ferroelectric memory integrated circuit with improved...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S303000, C257S306000

Reexamination Certificate

active

06858890

ABSTRACT:
An IC with memory cells arranged in a chained architecture is disclosed. The top local interconnect between the top capacitor electrodes and active area is achieved by using a strap. The use of a strap eliminates the need for additional metal layer which reduces manufacturing costs. Furthermore, sidewall spacers are used to isolate the strap from the different layers of the capacitors. The use of spacers advantageously enables the strap to be self-aligned.

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patent: 6121649 (2000-09-01), Kunishima
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patent: 6242299 (2001-06-01), Hickert
patent: 6399974 (2002-06-01), Ohtsuki
patent: 0 877 422 (1998-11-01), None
Ozaki et al., A Fully Planalized 8M Bit Ferroeloetric RAM with “Chain” Cell Structure, 2001 Symposium on VLSI Technology Digest of Technical Papers, Jun. 12, 2001, p. 113-114.

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