Ferroelectric memory device including a controller

Static information storage and retrieval – Systems using particular element – Ferroelectric

Reexamination Certificate

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C365S149000, C365S230060

Reexamination Certificate

active

06600674

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a ferroelectric memory device.
2. Description of the Related Art
Conventionally, FeRAM (Ferroelectric Random Access Memory) is well known ferroelectric memory. One example is the 2-transistor 2-capacitor/1-bit type. In FeRAM of this type, pairs of memory cells, each of which is constituted by a transistor and a capacitor, are used to store binary information sets.
FeRAM is disclosed in the following well known reference: “Low Power Consumption, High-speed LSI Technique”, Realize Co., Ltd., pp. 234-240.
A memory cell array commonly used for FeRAM includes a matrix-shaped arrangement of memory cells. The structure of one column of such a memory cell array is shown in FIG.
18
. As is shown in
FIG. 18
, for FeRAM
2000
, memory cells M
0
, M
1
, . . . respectively include selection transistors T
0
, T
1
, . . . and ferroelectric capacitors C
0
, C
1
, . . . . The ferroelectric capacitors C
0
, C
1
, . . . store directionally polarized binary data.
In FeRAM of the 2-transistor 2-capacitor/1-bit type, binary data having different values are stored in the ferroelectric capacitors (e.g., the capacitors C
0
and C
1
) of paired memory cells (e.g., the memory cells M
0
and M
1
).
FIG. 19
is a timing chart for the data reading operation performed for FeRAM
2000
. In
FIG. 19
, L denotes a ground potential and H denotes a power voltage Vcc. Vh denotes a potential that is higher than the power voltage Vcc the equivalent of the threshold value Vt of the selection transistors T
0
, T
1
. . . .
First, at time t
1
, the potential on a precharge control line PCHG is set to L, and transistors PCT
0
and PCT
1
are rendered off. At this time, bit lines BL
0
and BL
1
are placed in the floating state.
Next, at time t
2
, the potentials on word lines WL
0
and WL
1
are set to Vh, and the selection transistors T
0
and T
1
are rendered on.
When at time t
3
the potential on a plate line PL
0
is set to H, the potential on the plate line PL
0
is applied to the bit lines BL
0
and BL
1
via the ferroelectric capacitors C
0
and C
1
and the selection transistors T
0
and T
1
, so that a read potential is generated across the bit lines BL
0
and BL
1
. Since the capacitances of the ferroelectric capacitors C
0
and C
1
differ depending on the polarization direction, the values of the read potentials generated across the bit lines BL
0
and BL
1
also differ in accordance with the polarization direction.
At time t
4
, the potential of a signal SAE is set to H, and a sense amplifier SA is activated. Then, the potentials across the bit lines BL
0
and BL
1
are amplified.
At time t
5
, the potential on the plate line PL
0
is returned to L, and at the same time, the potential of a column selection signal SEL is set to H. Then, bit line selection transistors SET
0
and SET
1
are rendered on and the read potentials on the bit lines BL
0
and BL
1
are output to a data bus
2210
.
At time t
6
, the potential on the precharge control line PCHG is set to H, and the potentials on signal lines SAE and SEL are set to L. Then, the transistors PCT
0
and PCT
1
are rendered on to ground the bit lines BL
0
and BL
1
and the sense amplifier SA halts the output of read data.
Finally, at time t
7
, the potentials on the word lines WL
0
and WL
1
are set to L, and the selection transistors T
0
and T
1
are rendered off.
FIG. 20
is a conceptual diagram for explaining the state shifting of a ferroelectric capacitor. The horizontal axis represents a voltage V, and the vertical axis represents polarization Pr [&mgr;C/cm
2
]. As is shown in
FIG. 20
, the relationship existing between the voltage V and the polarization Pr describes a hysteresis curve H, and the inclination of the hysteresis curve H corresponds to the capacitance [q/V] across the ferroelectric capacitor.
In
FIG. 20
, assume that the coordinates of an intersection A of the hysteresis curve H and the Pr axis (area of Pr>0) are (
0
, p
0
). Further, when a linear line S
1
is drawn so that it passes through point B(Vcc,p
0
) and intersects linear line Pr=p
0
at an angle of &thgr;, assume that the coordinates of an intersection C of the linear line S
1
and the ascending segment of the hysteresis curve H are (v
1
, p
1
). The angle &thgr; is then determined in accordance with the capacitance on the bit line. The V coordinate v
1
of the point C matches the inter-terminal voltage at the ferroelectric capacitor, and the difference Vcc-v
1
between the V coordinates of the points B and C matches the potential on the bit line. Therefore, when Pr>0 (the stored value is “0”), the potential V
0
output to the bit line is represented by Vcc-v
1
.
Further assume in
FIG. 20
that the coordinates of an intersection D of the hysteresis curve H and the Pr axis (area of Pr>0) are (
0
, p
2
). Furthermore, when a linear line S
2
is drawn so that it passes through point E (Vcc, p
2
) and intersects a linear line Pr=p
2
at an angle &thgr;, the coordinates of an intersection F of the linear line S
1
and the ascending segment of the hysteresis curve H are (v
2
, p
3
). Also, in this case, the V coordinates v
2
of the point F match the inter-terminal voltage at the ferroelectric capacitor, and the difference Vcc-v
2
between the V coordinates of the points E and F matches the bit line potential. Therefore, when Pr<0 (the stored value is “1”), the potential V
1
output to the bit line is represented by Vcc-v
2
.
As is apparent from
FIG. 20
, V
0
<V
1
is established, and the angle &thgr; is such that the read margin &Dgr;V is at its maximum. In order to increase the angle &thgr;, only the capacitance on the bit line need be increased.
FIG. 21
is a graph showing the relationship between the reading margin &Dgr;V and a ratio Cbl/Cs of the capacitance Cbl on the bit line to the capacitance Cs on the ferroelectric capacitor. As is apparent from
FIG. 21
, when Cbl/Cs is between 4 and 5, the maximum reading margin is obtained. Further, when the reading margin is increased, the reliability of the data read is increased and the yield provided by the FeRAM is improved.
The capacitances Cb
1
on the bit lines BL
0
and BL
1
are the junction capacitances of the transistors T
0
, T
1
, . . . and PCT
0
, PCT
1
, . . . , which are connected to the bit lines BL
0
, BL
1
, . . . , or are the parasitic capacitances on the bit lines BL
0
, BL
1
, . . . . In most cases, the capacitances on the bit lines BL
0
, BL
1
, . . . are derived from the junction capacitances provided by the selection transistors T
0
, T
1
, . . . . For conventional FeRAMs, several hundreds of selection transistors are connected to one bit line in order to increase the capacitances Cbl placed on the bit lines BL
0
, BL
1
, . . . .
However, when the capacitances Cbl placed on the bit lines BL
0
, BL
1
, . . . are increased, this is accompanied by an increase in the power consumed by the sense amplifier SA (see FIG.
18
). For data reading, the potentials on the bit lines BL
0
, BL
1
, . . . are amplified until they reach the level of the power potential Vcc or the ground potential, and this amplification to the power potential Vcc is implemented by a current supplied to the bit lines BL
0
, BL
1
, . . . by the sense amplifier SA. Therefore, as the capacitances placed on the bit lines BL
0
, BL
1
, . . . are large, the consumption of power by the sense amplifier SA is increased.
For these reasons, a demand exists for ferroelectric memory for which the read data is reliable and the consumed power is small.
SUMMARY OF THE INVENTION
According to the present invention, a ferroelectric memory device comprises:
a plurality of memory cells, arranged in the shape of a matrix, including capacitors, for which a ferroelectric substance is used, on which binary data is stored while the capacitors are in a polarized state;
a plurality of bit lines, connected to several of the memory cells aligned in a first direction;
a plurality of word lines, connected in series to the memory cells

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