Ferroelectric memory device having a hydrogen barrier film

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S306000, C257S310000, C257S311000

Reexamination Certificate

active

06982444

ABSTRACT:
There is provided a semiconductor device having a ferroelectric capacitor formed on a semiconductor substrate covered with an insulator film, wherein the ferroelectric capacitor comprises: a bottom electrode formed on the insulator film; a ferroelectric film formed on the bottom electrode; and a top electrode formed on the ferroelectric film. The ferroelectric film has a stacked structure of either of two-layer-ferroelectric film or three-layer-ferroelectric film. The upper ferroelectric film is metallized and prevents hydrogen from diffusing in lower ferroelectric layer. Crystal grains of the stacked ferroelectric films are preferably different.

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International Symposium on Integrated Ferroelctrics 99, ABSTRACTS, Hiroyuki Kanaya, et al., “Hydrogen-induced Imprint Mechanism of Pt/PZT/Pt Capacitor by Low-temperature Hydrogen Treatment”, Mar. 7-10, 1999, p. 113C.

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