Ferroelectric memory device capable of adjusting bit line...

Static information storage and retrieval – Systems using particular element – Ferroelectric

Reexamination Certificate

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C365S207000, C365S190000, C365S225700

Reexamination Certificate

active

06269019

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention concerns a ferroelectric memory device which utilizes the polarization of ferroelectric material.
2. Description of Related Art
FIG. 14
is a circuit diagram showing the configuration of ferroelectric memory (FeRAM) devices of the prior art. In
FIG. 14
, the structure of an ordinary FeRAM memory array is shown. This FeRAM device comprises a plurality of word lines WL
0
to WL
3
, a plurality of plate lines PL
0
and PL
1
, and a plurality of bit lines BL
0
to BL
3
. A memory cell is connected to each of these lines. Further, the FeRAM device comprises a sense amplifier
10
. Each of the bit lines BL
0
to BL
3
is connected to this sense amplifier
10
. This sense amplifier
10
operates according to a sense amplifier activation signal SAE.
The memory cell M
0
contained in the FeRAM device comprises the selection transistor T
0
and ferroelectric capacitor C
0
; similarly, the memory cell M
1
comprises the selection transistor T
1
and ferroelectric capacitor C
1
. In general, NMOS transistors are used as the selection transistors. The main current path (channel) of this selection transistor T
0
and the ferroelectric capacitor C
0
are connected in series between the bit line BL
0
and the plate line PL
0
, in order from the side of the bit line BL
0
, and the control electrode (gate electrode) of the selection transistor T
0
is connected to the word line WL
0
. The main current path of the selection transistor T
1
and the ferroelectric capacitor C
1
are connected in series between the bit line BL
1
and the plate line PL
0
, in order from the side of the bit line BL
1
, and the control electrode of the selection transistor T
1
is connected to the word line WL
1
.
The FeRAM device further comprises a floating control line EQ
0
and transistors T
4
and T
5
for floating control. The main current paths of each of these transistors T
4
and T
5
are connected in series between the bit lines BL
0
and BL
1
. The point of connection between these main current paths is connected to a ground terminal GND. Each of the control electrodes of the transistors T
4
and T
5
is connected to the control line EQ
0
.
Reading of data from such a FeRAM device is generally performed in conformance with the method described in the publication “Low-Power High-Speed LSI Circuits & Technology”, pp. 234-236, published by Realize Inc.
FIG. 15
is a timing chart showing the data readout operation in a conventional FeRAM device. Below, this readout operation is explained with reference to FIG.
15
. In
FIG. 15
, the symbol “L” signifies ground potential, and the symbol “H” signifies the power supply voltage (Vcc).
At time t1, the floating control line EQ
0
is set to level “L”, and the bit lines BL
0
and BL
1
are put in a floating state. Next, at time t2, a voltage VH is applied to the word lines WL
0
and WL
1
, and the gates of the selection transistors T
0
and T
1
open. The applied voltage VH is higher than the power supply voltage Vcc by an amount equal to the threshold voltage Vt of the selection transistors.
Next, at time t3, the plate line PL
0
is set to “H”. Read potentials occur on the bit lines BL
0
and BL
1
, via the ferroelectric capacitors C
0
and C
1
respectively. The capacitances of the capacitors C
0
and C
1
differ depending on the polarization direction, and so the read potentials occurring on the bit lines BL
0
and BL
1
differ according to the respective polarization directions.
Next, at time t4, the sense amplifier activation signal SAE is set to “H”, and the sense amplifier
10
is activated. The sense amplifier
10
detects the difference in the read potentials occurring on the bit lines BL
0
and BL
1
, and amplifies the potentials to ground potential and to the power supply potential Vcc respectively. These potentials correspond to a logical “0” and “1” respectively after reading.
FIG. 16
is a graph showing the relation between charge in a ferroelectric capacitor and applied voltage. In the graph, the voltage V applied to the ferroelectric capacitor is plotted along the horizontal axis, and the charge Q on the ferroelectric capacitor is plotted along the vertical axis. On the graph, the curve a represents the change in charge when data “1” is read, that is, the capacitance Cf
1
of the ferroelectric capacitor when data “1” is stored. The curve b represents the change in charge when data “0” is read, that is, the capacitance Cf
0
of the ferroelectric capacitor when data “0” is stored. The straight line c represents the load line; its gradient is determined by the value of the bit line capacitance Cb. The load line c and the horizontal axis intersect at the power supply voltage Vcc. The difference Vl between the voltage at the point of intersection of the load line c and curve a, and the power supply voltage Vcc, corresponds to the bit line potential when data “1” is read out. The difference V
0
between the voltage at the point of intersection of the load line c and curve b, and the power supply voltage Vcc, corresponds to the bit line potential when data “0” is read out. It is necessary that the difference &Dgr;V between these bit line potentials V
1
and V
0
be equal to or greater than the discrimination sensitivity of the sense amplifier.
However, the hysteresis characteristics of ferroelectric capacitors are greatly affected by device fabrication processes, and characteristic degradation occurs readily. As shown in
FIG. 16
, the capacitances Cf
1
and Cf
0
of ferroelectric capacitors which have undergone characteristic degradation are reduced, becoming the capacitance Cf
1
′ indicated by the curve a′ and the capacitance Cf
0
′ indicated by the curve b′, respectively. As a result, the difference V
1
′ between the voltage at the intersection of the load line c and curve a′, and the power supply voltage Vcc, is reduced compared with V
1
. Further, the difference V
0
′ between the voltage at the intersection of the load line c and curve b′, and the power supply voltage Vcc, is reduced compared with V
0
. In particular, due to the properties of ferroelectric materials, there are large fluctuations in the readout potential V
1
during reversal. Hence the difference &Dgr;V′ between these bit line potentials V
1
′ and V
0
′ is also reduced compared with the original &Dgr;V. This reduction in &Dgr;V means that there is a reduction in the sense margin (the readout margin), and is a direct cause of read errors.
Hence a ferroelectric memory device having a large readout margin has long been sought.
SUMMARY OF THE INVENTION
The ferroelectric memory device of this invention comprises a plurality of word lines, a plurality of plate lines, a plurality of bit lines, a bit line capacitance variation device which changes a bit line capacitance according to the bit line potential, and a plurality of memory cells; these memory cells comprise a ferroelectric capacitor and a selection transistor.
In a ferroelectric memory device of this invention, it is preferable that the main current path of a selection transistor and a ferroelectric capacitor be connected in series between a bit line and a plate line, in order from the bit line side, and that the control electrode of the selection transistor be connected to a word line.
FIG. 1
is a circuit diagram showing one example of a ferroelectric memory (FeRAM) device of this invention. In
FIG. 1
, the configuration of the principal parts of the FeRAM device is shown; parts of the word lines, plate lines, bit lines, memory cells, and other components are omitted. The FeRAM device shown in
FIG. 1
comprises a plurality of word lines WL
0
to WL
3
, a plurality of plate lines PL
0
and PL
1
, and a plurality of bit lines BL
0
to BL
3
. Memory cells are connected to each of these lines. The FeRAM device also comprises a sense amplifier
10
. Each of the bit lines BL
0
to BL
3
is connected to this sense amplifier
10
. This sense amplifier
10
operates according to the sense amplifier activatio

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