Ferroelectric emitter

Details Ferroelectric emitter Ferroelectric emitter

2005-04-26

2005-04-26

Williams, Joseph (Department: 2879)

Electric lamp and discharge devices

Electrode and shield structures

Cathodes containing and/or coated with electron emissive...

C313S311000, C313S310000

Reexamination Certificate

active

06885138

ABSTRACT:
A ferroelectric multi-layered emitter used in a semiconductor lithography process includes a lower electrode, a ferroelectric layer, having a top surface with two end portions, which overlies the lower electrode, an insertion electrode formed on a region excluding the two end portions of the top surface of the ferroelectric layer, a dielectric layer, having sides and a top surface with two end portions, which has a predetermined pattern and is formed along the top surface of the ferroelectric layer and the insertion electrode, and a dummy upper electrode formed on a side of the dielectric layer opposite the ferroelectric layer. The ferroelectric emitter of the present invention guarantees uniform electron emission from wide and narrow gaps of a mask layer and in an isolated pattern such as a doughnut shape for ferroelectric switching emission lithography.

REFERENCES:
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patent: 5874802 (1999-02-01), Choi et al.
patent: 6246069 (2001-06-01), Hsu et al.
patent: 6479924 (2002-11-01), Yoo
patent: 6635495 (2003-10-01), Hashimoto et al.
patent: 10-223129 (1998-08-01), None

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