Ferroelectric element and actuator using the same, and ink...

Details Ferroelectric element and actuator using the same, and ink... Ferroelectric element and actuator using the same, and ink...

2006-04-04

2006-04-04

Abraham, Fetsum (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C438S003000

Reexamination Certificate

active

07023036

ABSTRACT:
A ferroelectric element is described which has a structure including a common electrode11,a ferroelectric film10formed on the common electrode11,an individual electrode3formed on the ferroelectric film10,a lead wire15for feeding electric power to the individual electrode3,which is formed on the same plane as of the individual electrode3,and a protection film16entirely covering the exposed parts of the ferroelectric film10and the individual electrode3,and covering the lead wire15.The protection film16is preferably made of a material whose Young's modulus is smaller than that of the ferroelectric film10,exactly 1/20 or smaller of the Young's modulus of the ferroelectric film10.Further, the ferroelectric film is formed with the insulation reinforcing film containing at least one of the elements constituting the ferroelectric film.

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patent: 6613586 (2003-09-01), Bailey
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patent: 10-217458 (1998-08-01), None
patent: 2000-4004 (2000-01-01), None

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