Ferroelectric capacitors having oxidation barrier conductive...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S310000

Reexamination Certificate

active

10650879

ABSTRACT:
Ferroelectric capacitors are provided that include an integrated circuit substrate and a supporting insulation layer on the integrated circuit substrate having a face and a trench in the face. An oxidation barrier conductive layer is provided in the trench and a lower electrode is provided on the oxidation barrier conductive layer. A ferroelectric layer is provided on the lower electrode and an upper electrode is provided on the ferroelectric layer. Related methods of fabricating ferroelectric capacitors are also provided.

REFERENCES:
patent: 6521927 (2003-02-01), Hidaka et al.
patent: 6593638 (2003-07-01), Summerfelt et al.
patent: 6764862 (2004-07-01), Park et al.
patent: 10-107223 (1998-04-01), None
patent: 10-335581 (1998-12-01), None
patent: 1999-0039831 (1999-06-01), None
patent: 2002-0035792 (2002-05-01), None
Korean Patent Office, Notice to File a Response/Amendment to the Examination Report, Aug. 26, 2004.
Korean Patent Office, Notice to File a Response/Amendment to the Examination Report, Aug. 26, 2004 (English Translation).
Korean Patent Office, Notice to File a Response To a Rejection, corresponding to Korean Patent application 2002-54908, received Mar. 15, 2005.
Korean Patent Office, Notice to File a Response To a Rejection, corresponding to Korean Patent application 2002-54908, received Mar. 15, 2005 (English Translation).

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