Ferroelectric capacitor, method of manufacturing same, and...

Details Ferroelectric capacitor, method of manufacturing same, and... Ferroelectric capacitor, method of manufacturing same, and...

2005-03-29

2005-03-29

Tran, Minh-Loan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S310000, C257S532000

Reexamination Certificate

active

06872995

ABSTRACT:
A ferroelectric capacitor has the property that polarization of a ferroelectric thin film can readily be reversed and polarization-reversal charge increased. The ferroelectric capacitor has a bottom electrode, a ferroelectric thin film and a top electrode. The top electrode includes a metal crystalline phase and 0.5 to 5 atm % interstitial oxygen atoms in the metal crystalline phase.

REFERENCES:
patent: 5864153 (1999-01-01), Nagel et al.
patent: 6454914 (2002-09-01), Nakamura
patent: 20020070404 (2002-06-01), Bruchhaus et al.

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