FEOL/MEOL metal resistor for high end CMOS

Details FEOL/MEOL metal resistor for high end CMOS FEOL/MEOL metal resistor for high end CMOS

2004-08-06

2008-07-08

Wilczewski, M. (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S358000, C257SE21703, C257SE27112

Reexamination Certificate

active

07397087

ABSTRACT:
A FEOL/MEOL metal resistor that has tight sheet resistance tolerance (on the order of about 5% or less), high current density (on the order of about 0.5 mA/micron or greater), lower parasitics than diffused resistors and lower TCR than standard BEOL metal resistors as well as various methods of integrating such a metal resistor structure into a CMOS technology are provided.

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