Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-08-16
2005-08-16
Whitmore, Stacy A. (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C356S124000, C430S005000
Reexamination Certificate
active
06931618
ABSTRACT:
A system for selectively generating and feeding forward reticle fabrication data is provided. The system includes components for fabricating a reticle and a control system operatively connected to the fabricating components, where the control system can control the operation of the fabricating components. The control system bases its control of the fabricating components, at least in part, on feed forward control information generated by a processor that analyzes scatterometry based reticle fabrication data gathered from measurement components. The scatterometry data is compared to data stored in a signature data store that facilitates analyzing gathered scatterometry signatures to produce feed forward control information that can be employed to manipulate subsequent reticle fabrication processes and/or apparatus.
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Rangarajan Bharath
Singh Bhanwar
Subramanian Ramkumar
Tabery Cyrus E.
Advanced Micro Devices , Inc.
Amin & Turocy LLP
Dimyan Magid Y.
Whitmore Stacy A.
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