Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Reexamination Certificate
2006-03-28
2006-03-28
Patidar, Jay (Department: 2862)
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
C324S248000, C324S765010, C324S750010
Reexamination Certificate
active
07019521
ABSTRACT:
Circuit flaws in microelectronic circuitry present regions of high resistance in which a current distribution deviates from that of a defect-free circuit. The altered current distribution emits a correspondingly altered magnetic field in accordance with Ampere's Law. When compared with the magnetic field of a defect-free circuit, the anomaly in the magnetic field of the defective device is detected and the location of the circuit flaw may be determined therefrom. As the anomaly in the magnetic field is very small in magnitude, a sensitive magnetic microscope is utilized to obtain images of the magnetic fields of a defect-free reference device and a device-under-test. The distance between the magnetic sensor and the devices being scanned is precisely controlled to minimize influences of scanning distance on the difference in measured magnetic field strength. Comparative image analysis reveals the location of the circuit flaw. Maximal image registration through image interpolation, displacement and resampling optimizes the comparative image analysis.
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Cawthorne Alfred B.
Knauss Lee
Orozco Antonio
Talanova Elena
Venkatesan Thirumalai
Neocera, Inc.
Patidar Jay
Rosenberg , Klein & Lee
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