Fault detection and virtual sensor methods for tool fault...

Details Fault detection and virtual sensor methods for tool fault... Fault detection and virtual sensor methods for tool fault...

2005-05-17

2005-05-17

Paladini, Albert W. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000, C700S109000, C700S121000, C700S160000, C700S174000

Reexamination Certificate

active

06895293

ABSTRACT:
Fault detection of a semiconductor processing tool employs several techniques to improve accuracy. One technique is sensor grouping, wherein a fault detection index is calculated from a group of tool operational parameters that correlate with one another. Another technique is sensor ranking, wherein sensors are accorded different weights in calculating the fault detection index. Improved accuracy in fault detection may be accomplished by employing a variety of sensor types to predict behavior of the semiconductor processing tool. Examples of such sensor types include active sensors, cluster sensors, passive/inclusive sensors, and synthetic sensors.

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