Fast-response spatial light modulator

Optical: systems and elements – Optical modulator – Light wave directional modulation

Reexamination Certificate

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Details

C359S291000

Reexamination Certificate

active

07443572

ABSTRACT:
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a cavity having an opening on the lower surface; a substrate comprising an upper surface, a hinge support post in connection with the upper surface, and a hinge component supported by the hinge support post and in connection with the mirror plate; and a landing tip having a laterally extended upper portion and a vertically extended lower portion in connection with the substrate and the vertically extended lower portion. The laterally extended upper portion can contact the lower surface of the mirror plate to limit the rotation of the mirror plate. The hinge component extends into the cavity and can facilitate a rotation of the mirror plate.

REFERENCES:
patent: 6825968 (2004-11-01), Aubuchon
patent: 6856068 (2005-02-01), Miller et al.
patent: 6880936 (2005-04-01), Shin
patent: 6987601 (2006-01-01), Kaeriyama
patent: 6992810 (2006-01-01), Pan et al.
patent: 7099060 (2006-08-01), Nanjyo et al.
patent: 2005/0128564 (2005-06-01), Pan
patent: 2007/0121191 (2007-05-01), Pan
patent: 2007/0121192 (2007-05-01), Lee et al.
patent: 2007/0132681 (2007-06-01), Chen
patent: 2007/0206265 (2007-09-01), Pan et al.

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