Fast-response micro-mechanical devices

Details Fast-response micro-mechanical devices Fast-response micro-mechanical devices

2005-11-29

2008-12-30

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C359S292000, C359S295000, C359S298000, C359S315000, C345S085000, C345S108000, C348S770000, C348S771000

Reexamination Certificate

active

07471445

ABSTRACT:
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a substrate portion comprising a cavity having an opening on the lower surface, a substrate comprising an upper surface, a hinge support post in connection with the substrate, and a hinge component supported by the hinge support post and in connection with the mirror plate, and one or more landing tips configured to contact the lower surface of the mirror plate to limit rotation of the mirror plate. The hinge component includes a protrusion that is anchored in a hole in the top surface of the hinge support post and the hinge component is configured to extend into the cavity to facilitate rotation of the mirror plate.

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