Fan filter unit having a monitoring device for use in a semicond

Details Fan filter unit having a monitoring device for use in a semicond Fan filter unit having a monitoring device for use in a semicond

1998-01-06

2000-06-13

Simmons, David A.

Gas separation: apparatus

With signals, indicators, measuring, or testing means

553852, 55471, 55DIG34, 116DIG25, B01D 35143

Patent

active

060744634

ABSTRACT:
A fan filter unit has a blower, a motor, a filter and a charge induction sensor installed on the ceiling of a clean room. The charge induction sensor is movable between a drive stopped position at which the sensor can be seen with the naked eye and a normal drive position at which the sensor can not be discriminated from the bottom of the filter. The direction of air passing through the filter and static charges prevailing in the unit dictate the position assumed by the sensor.

REFERENCES:
patent: 2655894 (1953-10-01), Rabbitt
patent: 3522724 (1970-08-01), Knab
patent: 3639998 (1972-02-01), Mason
patent: 4610703 (1986-09-01), Kowalczyk

Affiliated with

Also associated with

Rating

Fan filter unit having a monitoring device for use in a semicond does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fan filter unit having a monitoring device for use in a semicond, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fan filter unit having a monitoring device for use in a semicond will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2065238