Failure analyzer

Details Failure analyzer Failure analyzer

1997-09-16

1999-05-18

Elmore, Reba I.

Boots, shoes, and leggings

36446801, 36446802, 36446818, 36446816, 702183, 702185, 702186, G06F19/00

Patent

active

059056509

ABSTRACT:
Failures detected by a tester are collated with defects detected by a defect checking device (Step S6). The collation is performed by retrieving defects coincident with each failure within a tolerance R0. Based on a mean value of displacements between the failures and the defects which are coincident with each other, coordinate values of the defects are corrected (Step S10). The coordinate values are corrected only when a collating ratio S that is a ratio of failures with which defects are coincident to whole failures exceeds a constant value S0 (Step S7). As a result, a coordinate value of a defect having high precision is obtained.

REFERENCES:
patent: 5219765 (1993-06-01), Yoshida et al.
patent: 5245554 (1993-09-01), Tsuyama et al.
patent: 5341304 (1994-08-01), Sakomoto et al.
patent: 5463459 (1995-10-01), Morioka et al.
patent: 5475766 (1995-12-01), Tsuchiya et al.
patent: 5598341 (1997-01-01), Ling et al.

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