Failure analysis vehicle for yield enhancement with self...

Details Failure analysis vehicle for yield enhancement with self... Failure analysis vehicle for yield enhancement with self...

2006-10-31

2006-10-31

Ngô, Ngân V. (Department: 2818)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

C438S017000

Reexamination Certificate

active

07129101

ABSTRACT:
A test vehicle for evaluating a manufacturing process for integrated circuits that uses a more space efficient layout of library driving cells arranged to produce circuits that exercise many interconnections that may be designed at the minimum design parameters of a manufacturing process. The cells can be configured to operate as ring oscillators increasing the effective circuit frequency of the test module allowing higher frequency circuit testing, and shortening the time it takes to perform life cycle testing. Visibly marking cells, combined with electrically isolating error prone circuit segments makes, identifying defects much more efficient. The accessibility of many testing methods allows quick location of root cause failures, which allows improvements to be made to the manufacturing process.

REFERENCES:
patent: 6781151 (2004-08-01), Schultz et al.
patent: 2004/0031008 (2004-02-01), Satoh et al.

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