Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
Reexamination Certificate
2007-05-15
2007-05-15
Le, Dieu-Minh (Department: 2114)
Error detection/correction and fault detection/recovery
Data processing system error or fault handling
Reliability and availability
C714S011000
Reexamination Certificate
active
10948085
ABSTRACT:
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
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Hadar Ron
Khalil Nidal
Lev-Ami Uzi
Sifnatsch Guenter
Beffel, Jr. Ernest J.
Haynes Beffel & Wolfeld
Le Dieu-Minh
MKS Instruments Inc.
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