Facet mirror having a number of mirror facets

Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces

Reexamination Certificate

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Details

C359S853000, C359S855000, C359S865000, C359S869000, C359S872000

Reexamination Certificate

active

10848210

ABSTRACT:
A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).

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