Facet mirror having a number of mirror facets

Details Facet mirror having a number of mirror facets Facet mirror having a number of mirror facets

2006-08-15

2006-08-15

Robinson, Mark A. (Department: 2872)

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

C359S858000, C359S298000, C359S198100

Reexamination Certificate

active

07090362

ABSTRACT:
In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.

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