Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2008-04-08
2008-04-08
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C359S853000, C359S855000, C359S865000, C359S869000, C359S872000
Reexamination Certificate
active
07354168
ABSTRACT:
A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
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Dornheim Stefan
Faltus Jurgen
Heisler Andreas
Holderer Hubert
Mann Heinz
Carl Zeiss SMT AG
Gray-Robinson, PA
Shafer Ricky D.
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