Fabrication test circuit and method for signalling out-of-spec r

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324525, 324763, 324765, 371 225, G01R 3102

Patent

active

054850959

ABSTRACT:
Test circuits and methods for accurately flagging out-of-spec resistance in a current carrying structure of an integrated circuit employ a plurality of monitor structures connected in parallel and a test means for monitoring the monitor structures. Each monitor structure includes a test structure and an associated threshold sensitive device. Each test structure is predesigned relative to the current carrying structure of the integrated circuit such that an out-of-spec resistance in the test structure signals a possible out-of-spec resistance in the current carrying structure. The threshold sensitive device of each monitor structure outputs a fail signal when resistance of the associated test structure is above a predefined level. The fail signal is representative of an out-of-spec resistance in the associated test structure and flags possible out-of-spec resistance in the current carrying structure. The test means simultaneously monitors the plurality of monitor structures for a fail signal. An automated test device is also disclosed for providing a binary count representative of a total number of out-of-spec test structures.

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