Fabrication technique for the production of devices which depend

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156653, 156656, 156657, 204192E, 427131, C23F 102, G11C 1114

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active

043349510

ABSTRACT:
Magnetic bubble devices having planar geometry are produced by a particular sequence of processing steps. This sequence of processing steps includes the sequential deposition on a garnet material of an insulating material, an electrically conductive material, a second insulating material, and a material such as permalloy. The upmost layer is then patterned by conventional techniques. The pattern thus produced is used as a mask and the exposed underlying insulating layer is removed. The exposed metal conducting layer is then patterned and etched in a pattern different from that of the permalloy and second insulating layers by a process such as selective plasma etching that does not substantially degrade the exposed dielectric material or the permalloy. The results are a device with layers having planar geometry.

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patent: 4098917 (1978-07-01), Bullock et al.
patent: 4172758 (1979-10-01), Bailey et al.
patent: 4208241 (1980-06-01), Harshbarger et al.
patent: 4238277 (1980-12-01), Bril
patent: 4272348 (1981-06-01), Cox et al.
patent: 4299680 (1981-11-01), Fontana, Jr. et al.

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