Fabrication system and fabrication method

Details Fabrication system and fabrication method Fabrication system and fabrication method

2008-06-24

2008-06-24

DeCady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000

Reexamination Certificate

active

07392106

ABSTRACT:
A fabricating method for a system that includes a plurality of processing apparatuses connected to each other by an inter-apparatus transporter and a computer storing managing information of processing and transporting of semiconductor wafers. The processing apparatuses have an interface for loading and unloading a plurality of the semiconductor wafers that are contained in a carrier. The semiconductor waters are processed in processing chambers of the processing apparatuses and the result of processing is monitored. In the processing, a first carrier containing the plurality of the semiconductor wafers having been processed in the first processing apparatus is transported toward the second processing apparatus by the inter-apparatus transporter prior to unloading of a second carrier containing semiconductor wafers processed in the second processing apparatus, according to the managing information.

REFERENCES:
patent: 3812947 (1974-05-01), Nygaard
patent: 4510673 (1985-04-01), Shils et al.
patent: 4571685 (1986-02-01), Kamoshida
patent: 4592306 (1986-06-01), Galleco
patent: 4796194 (1989-01-01), Atherton
patent: 4886592 (1989-12-01), Anderle
patent: 4901242 (1990-02-01), Kotan
patent: 5019233 (1991-05-01), Blake
patent: 5024570 (1991-06-01), Kiriseko
patent: 5067218 (1991-11-01), Williams
patent: 5076205 (1991-12-01), Vowles
patent: 5100276 (1992-03-01), Iwasaki et al.
patent: 5105362 (1992-04-01), Kotani
patent: 5111404 (1992-05-01), Kotani
patent: 5135608 (1992-08-01), Okutani
patent: 5202716 (1993-04-01), Tateyama
patent: 5237508 (1993-08-01), Furukawa et al.
patent: 5259881 (1993-11-01), Edwards
patent: 5388945 (1995-02-01), Garric
patent: 5399531 (1995-03-01), Wu
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5436848 (1995-07-01), Nishida et al.
patent: 5442561 (1995-08-01), Yoshizawa et al.
patent: 5443346 (1995-08-01), Murata
patent: 5445491 (1995-08-01), Nakagawa
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5601686 (1997-02-01), Kawamura et al.
patent: 5820679 (1998-10-01), Yokoyama et al.
patent: 5858863 (1999-01-01), Yokoyama et al.
patent: 6099598 (2000-08-01), Yokoyama et al.
patent: 502412 (1992-11-01), None
patent: 57-157518 (1982-09-01), None
patent: 58-50728 (1983-03-01), None
patent: 60-10641 (1985-01-01), None
patent: 61-128512 (1986-06-01), None
patent: 63-244730 (1988-10-01), None
patent: 63-288009 (1988-11-01), None
patent: 64-6540 (1989-02-01), None
patent: 2-292810 (1990-12-01), None
patent: 4115513 (1992-04-01), None
patent: 4-130618 (1992-05-01), None
patent: 4-199709 (1992-07-01), None
patent: 7-122622 (1995-05-01), None
“Operation of LSI Production System to Reduce Development Investment and to Meet Diversified Needs,” Nikkei Microdevice, Aug. 1992, pp. 66-74.
Wolf and Tauber, Silicon Processing for the VLSI Era, vol. 1, 1986, p. 429.
Mamoru Shibada, Cassette Transfer System “Auto Track”, Electrical Material, Mar. 1984, (pp. 4, 14-15, 17).
IBM Technical Disclosure Bulletin vol. 33 Issue 1A pp. 80-84, Jun. 1, 1990, “Knowledge-Based Dynamic Scheduler in Distributed Computer Control.”

Affiliated with

Also associated with

Rating

Fabrication system and fabrication method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication system and fabrication method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication system and fabrication method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2800004