Fabrication process of a semiconductor device including a...

Details Fabrication process of a semiconductor device including a... Fabrication process of a semiconductor device including a...

2005-05-17

2005-05-17

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S687000, C438S633000, C438S627000

Reexamination Certificate

active

06893953

ABSTRACT:
A method for fabricating a semiconductor device includes the steps of forming a barrier conductor layer on a substrate, exposing the barrier conductor layer to a first reducing gas atmosphere at an elevated substrate temperature, forming a metal film on the barrier conductor layer by a CVD process, and exposing the metal film to a second gas atmosphere at an elevated substrate temperature.

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