Fabrication process for EPROM cells with oxide-nitride-oxide die

Details Fabrication process for EPROM cells with oxide-nitride-oxide die Fabrication process for EPROM cells with oxide-nitride-oxide die

1987-04-20

1989-02-28

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 1566591, 156662, 357 235, 357 59, 437 52, 437191, 437233, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048082619

ABSTRACT:
The process calls for covering of the dielectric with a thin additional layer of polysilicon which has the function of protecting the dielectric from any defects which would otherwise be introduced from the subsequent masking.

REFERENCES:
patent: 4426764 (1984-01-01), Kosa et al.
patent: 4458407 (1984-07-01), Hoeg et al.
patent: 4688078 (1987-08-01), Hseih
patent: 4720323 (1988-01-01), Sato et al.

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