Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Patent
1999-01-11
2000-09-19
Bowers, Charles
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
438939, 438962, H01L 2100
Patent
active
061210757
ABSTRACT:
A quantum device is constituted from a two-dimensional array of quantum dots formed from metal atom aggregates contained in metalloprotein complex. The metalloprotein is arranged on the surface of a substrate having an insulation layer with a pitch of the size of the metalloprotein complex. The diameter of the metal atom aggregates used in the quantum device is 7 nm or smaller, and the pitch of the metalloprotein complex is preferably from 11 to 14 nm.
REFERENCES:
patent: 5281543 (1994-01-01), Fukuzawa et al.
patent: 5412499 (1995-05-01), Chiu et al.
Y. Nakamura et al., Jpn. J. Appl. Phys., 35, L1465-L1467 (1996).
K. Yano et al., Jpn. J. Appl. Phys., 63(12), 1248-1250 (1994).
Bowers Charles
Christianson Keith
Matsushita Electric - Industrial Co., Ltd.
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