Fabrication of composite materials using atomic layer...

Details Fabrication of composite materials using atomic layer... Fabrication of composite materials using atomic layer...

2011-04-12

2011-04-12

Meeks, Timothy H (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

C428S317900, C428S615000

Reexamination Certificate

active

07923068

ABSTRACT:
Methods of constructing composite films including particles embedded in a filler matrix involve preparing a collection of stacked particles, then depositing a matrix material throughout the particle collection using an atomic layer deposition (ALD) method so as to substantially completely fill the spaces between the particles with the matrix material. During matrix deposition, a vapor phase etch cycle may be periodically employed to avoid clogging of small pores in the particle collection. New composite materials formed by such methods are also disclosed.

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