Fabrication of an electronic microvalve apparatus

Details Fabrication of an electronic microvalve apparatus Fabrication of an electronic microvalve apparatus

1992-09-22

1993-09-14

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156647, 156653, 156656, 156657, 1566591, 156662, H01L 21306, B44C 122, C03C 1500, C23F 100

Patent

active

052445372

ABSTRACT:
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.

REFERENCES:
patent: 4581624 (1986-04-01), O'Connor
patent: 4770740 (1988-09-01), Tsuzuki et al.
patent: 4966646 (1990-10-01), Zdeblick

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