Fabrication method of semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156657, 1566611, 156662, 357 34, 357 43, 437235, 437241, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

046937820

ABSTRACT:
A method of fabrication of a semiconductor device by forming a thin film pattern in the emitter region, forming a base lead-out electrode self-aligningly by using this thin film pattern, and also forming a fine graft base region and emitter region, and an oxide film for isolating the emitter region and base region, whereby the emitter diffusion layer and active base diffusion layer are formed in a shallow depth of diffusion by heat diffusion from the semiconductor film in which ions are implanted.

REFERENCES:
patent: 4157269 (1979-06-01), Ning et al.
patent: 4484388 (1984-11-01), Iwasaki
patent: 4486942 (1984-12-01), Hirao

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