Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1986-09-03
1987-09-15
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156657, 1566611, 156662, 357 34, 357 43, 437235, 437241, H01L 21306, B44C 122, C03C 1500, C03C 2506
Patent
active
046937820
ABSTRACT:
A method of fabrication of a semiconductor device by forming a thin film pattern in the emitter region, forming a base lead-out electrode self-aligningly by using this thin film pattern, and also forming a fine graft base region and emitter region, and an oxide film for isolating the emitter region and base region, whereby the emitter diffusion layer and active base diffusion layer are formed in a shallow depth of diffusion by heat diffusion from the semiconductor film in which ions are implanted.
REFERENCES:
patent: 4157269 (1979-06-01), Ning et al.
patent: 4484388 (1984-11-01), Iwasaki
patent: 4486942 (1984-12-01), Hirao
Fujita Tsutomu
Kikuchi Kazuya
Komeda Tadao
Matsushita Electric - Industrial Co., Ltd.
Powell William A.
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