Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1999-01-06
2000-10-17
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 20419223, C23C 1400
Patent
active
061325678
ABSTRACT:
A method of making amorphous light rare-earth transition metal (LRE-TM)-metalloid alloys having perpendicular magneto anisotropy energy, is provided. In this method of making amorphous LRE-TM-metalloid alloys by depositing a metalloid on an LRE-TM by sputtering, the sign of a saturation magnetostriction constant of the alloy is made opposite to the sign of a stress by applying a different Ar sputtering pressure according to the sign of the saturation magnetostriction constant, in order to increase the effective perpendicular magneto anisotropy energy K.sub.Ueff containing the components of magneto elastic energy expressed by an expression ##EQU1## (here, .lambda..sub.s is the saturation magnetostriction constant, and .sigma. is the stress).
REFERENCES:
patent: 4889607 (1989-12-01), Buschow
patent: 4925742 (1990-05-01), Sugawara et al.
Nguyen Nam
Samsung Display Device Co., Ltd.
VerSteeg Steven H.
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