Fabrication method for thin film electroluminescent panels

Details Fabrication method for thin film electroluminescent panels Fabrication method for thin film electroluminescent panels

1991-01-11

1992-01-28

Simmons, David A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156664, 156665, 156637, 156655, H01L 2100

Patent

active

050841319

ABSTRACT:
A fabrication method for thin film electroluminescent panels including steps of forming a composite film by depositing Ni film on Al film for forming back electrodes and lead-out electrodes, forming a resist pattern on the composite film and etching the composite film into a predetermined pattern so as to form back electrodes and lead-out electrodes using an etchant containing phosphoric acid of 3.5 to 13.0 mol/l, sulphuric acid of 0.1 to 9.0 mol/l, nitric acid of 0.1 to 8.0 mol/l and acetic acid of 0.0 to 8.0 mol/l.

REFERENCES:
patent: 3855112 (1974-12-01), Tomozawa et al.
patent: 3890636 (1975-06-01), Harada et al.
patent: 3988254 (1976-10-01), Mori
patent: 4324841 (1982-04-01), Huang
patent: 4653858 (1987-03-01), Szydlo et al.
patent: 4959105 (1990-09-01), Neidiffer

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