Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1981-07-17
1984-03-27
Bernstein, Hiram H.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156DIG89, 350 9612, C30B 3106
Patent
active
044392656
ABSTRACT:
A simple, inexpensive, and reliable technique for substantially preventing the unwanted formation of a surface guiding layer during manufacture of light-guiding structures in LiNbO.sub.3 and LiTaO.sub.3 substrates is disclosed. The technique involves addition of an effective amount of a gaseous hydrogen donor to the processing atmosphere during high-temperature processing. A particularly convenient hydrogen donor is water vapor, which can be added to the atmosphere by, for instance, bubbling of the feed gas through a water column. A partial pressure of more than about 9 Torr of H.sub.2 O has been found effective in the practice of the technique.
REFERENCES:
patent: 4082601 (1978-04-01), Regreny et al.
Miller, "Integrated Optics", The Bell System Technical Journal, Sep. 1969, vol. 48, pp. 2059-2069.
Smith et al., "Correlation of Reduction", published in J. Appl. Phys., vol. 39, Sep. 1968, pp. 4600-4602.
Levinstein et al., "Reduction of the Susceptibility", Published in J. of Appl. Phys., vol. 38, Jul. 1967, pp. 3101-3102.
Burns et al., "Application of LiO.sub.2 ", Published in Appl. Phys. Letts., vol. 33, Jul. 1978, pp. 70-72.
Schmidt et al., "Metal-Diffused Optical Waveguides", Published in Applied Physics Letts., vol. 25, Oct. 1974, pp. 458-460.
Chemical Abstracts, vol. 89, 1978, Abstract 68,896, p. 602.
Holman et al., "Chemical Control of Optical Damage", Published in Appl. Phys. Lett., vol. 32, Mar. 1978, pp. 280-283.
Carruthers et al., "Diffusion Kinetics", Published in Appl. Optics, vol. 13, Oct. 1974, pp. 2333-2342.
Kaminow et al., "Optical Waveguiding", Published in Appl. Phys. Lett., vol. 22, Apr. 1973, pp. 326-328.
Ranganath et al, "Suppression of Li.sub.2 O", Published in Appl. Phys. Lett., vol. 30, Apr. 1977, pp. 376-379.
Mason, "Crystal Physics of Interaction Processes", Academic Press, New York, 1966, pp. 110-111.
Noda et al., "Effect of Mg diffusion", Published in J. of Appl. Phys., vol. 49, Jun. 1978, pp. 3150-3154.
Esdaile, "Closed Tube Control", Published in Appl. Phys. Lett. 33, Oct. 1978, pp. 733-734.
Chen et al., "Elimination of Li.sub.2 O", Published in Appl. Phys. Lett., vol. 30, Jun. 1977, pp. 570-571.
Miyazawa et al., "A Simple Technique", Published in Appl. Phys. Letts., vol. 31, Dec. 1977, pp. 742-744.
Alferness Rodney C.
Buhl Lawrence L.
Jackel Janet L.
Lyman Susan P.
Ramaswamy Vellayan
Bell Telephone Laboratories Incorporated
Bernstein Hiram H.
Laumann Richard D.
Pacher Eugen E.
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