Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-04-18
2008-12-30
Dang, Hung X (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C438S029000
Reexamination Certificate
active
07471440
ABSTRACT:
A method of fabricating a tiltable micro mirror plate includes forming a substrate comprising an upper surface and a hinge support post in connection with the upper surface, disposing over the substrate a first sacrificial material selected from the group of amorphous carbon, polyarylene, polyarylene ether, and hydrogen silsesquioxane, depositing one or more layers of structural materials over the first sacrificial material, forming an opening in the one or more layers of structural materials, wherein the opening can provide access from outside to the first sacrificial material below the one or more layers of structural materials, and removing the first sacrificial material to form the tiltable micro mirror plate in connection with the hinge support post.
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Dang Hung X
Fish & Richardson P.C.
Spatial Photonics, Inc.
Tra Tuyen Q
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