Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2008-05-23
2009-11-17
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
C257SE21002
Reexamination Certificate
active
07618835
ABSTRACT:
A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.
REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5142405 (1992-08-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5331454 (1994-07-01), Hornbeck
patent: 5382961 (1995-01-01), Gale, Jr.
patent: 5650881 (1997-07-01), Hornbeck
patent: 5665997 (1997-09-01), Weaver et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6469821 (2002-10-01), Bartlett et al.
patent: 6487001 (2002-11-01), Greywall
patent: 6819470 (2004-11-01), Meier et al.
patent: 6870659 (2005-03-01), Aubuchon
patent: 6914711 (2005-07-01), Novotney et al.
patent: 6992810 (2006-01-01), Pan
patent: 7148603 (2006-12-01), Garcia et al.
patent: 7167298 (2007-01-01), Pan
patent: 7245415 (2007-07-01), Pan
patent: 7388707 (2008-06-01), Pan
patent: 7394586 (2008-07-01), Pan
patent: 7405862 (2008-07-01), Pan et al.
patent: 7416908 (2008-08-01), Lee et al.
patent: 7453621 (2008-11-01), Novotny
patent: 7471440 (2008-12-01), Pan
patent: 2002/0140533 (2002-10-01), Miyazaki et al.
patent: 2004/0240033 (2004-12-01), Pan et al.
patent: 2005/0128564 (2005-06-01), Pan
patent: 2006/0245030 (2006-11-01), Pan
patent: 2008/0013147 (2008-01-01), Pan
Shaoher X. Pan, “High Contrast Spatial Light Modulator”, U.S. Appl. No. 10/974,461, filed Oct. 25, 2004, 31 pp.
Larry J. Hornbeck, “Digital Light Processing™ for High-Brightness, High-Resolution Applications”, Feb. 10-12, 1997, San Jose, CA, pp. 1-14.
Non-Final Office Action mailed Nov. 5, 2007, U.S. Appl. No. 11/467,367, 12 pp.
Fish & Richardson P.C.
Mulpuri Savitri
Spatial Photonics, Inc.
LandOfFree
Fabricating a spatial light modulator does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Fabricating a spatial light modulator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabricating a spatial light modulator will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4099159