Extreme ultraviolet reflector

Details Extreme ultraviolet reflector Extreme ultraviolet reflector

1989-02-06

1990-04-17

Arnold, Bruce Y.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

350622, 250504R, 372 99, G02B 1700, G02B 110, H01S 3081

Patent

active

049174479

ABSTRACT:
A multi-faceted mirror forms a retroreflector for a resonator loop in a free electron laser (FEL) operating in the XUV (.lambda.=10-100 nm). The number of facets is determined by the angle-of-incidence needed to obtain total external reflectance (TER) from the facet surface and the angle through which the FEL beam is to be turned. Angles-of-incidence greater than the angle for TER may be used to increase the area of the beam incident on the surface and reduce energy absorption density. Suitable surface films having TER in the 10-100 nm range may be formed from a variety of materials, including Al, single-crystal Si, Ag, and Rh. One of the facets is formed as an off-axis conic section to collimate the output beam with minimum astigmatism.

REFERENCES:
patent: 3826996 (1974-07-01), Jaegle et al.
A. V. Vinogradov et al., "On Wide-Band Mirrors for Soft X-Ray Range", 47 . Comm. No. 6, pp. 361-363, (Oct. 1983).
M. L. Scott et al., "Extreme Ultraviolet Reflectance Degradation of Aluminum and Silicon from Surface Oxidation", 27 Appl. Opt. No. 8, pp. 1503-1507 (Apr. 1988).

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