Exterior view examination apparatus

Details Exterior view examination apparatus Exterior view examination apparatus

1981-12-03

1984-05-08

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250310, H01J 3720

Patent

active

044477317

ABSTRACT:
An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with the scanning type electron microscope, the position of a surface part of the sample (mounted on the sample stage) to be observed, measured or analyzed being preliminary defined by the optical microscope, and the sample stage being moved by a certain amount thereby to bring the sample at the center of the visual field of the electron microscope.

REFERENCES:
patent: 4179604 (1979-12-01), Christou
patent: 4266128 (1981-05-01), Suzuki
patent: 4349242 (1982-09-01), Ogura

Affiliated with

Also associated with

Rating

Exterior view examination apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exterior view examination apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exterior view examination apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1604913