Extending storage time of removed plasma chamber components...

Details Extending storage time of removed plasma chamber components... Extending storage time of removed plasma chamber components...

2011-07-12

2011-07-12

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Processes

Metal base work, acid treating

C134S038000, C134S004000, C134S042000, C427S154000

Reexamination Certificate

active

07976641

ABSTRACT:
A method of extending storage time prior to cleaning a component of a plasma chamber is provided. The method comprises removing the component from the chamber, covering a thermal spray coating on the component while the surface is exposed to atmospheric air, storing the component, optionally removing the covering, and optionally wet cleaning reaction by-products from the thermal spray coating. Alternatively, instead of, or in addition to covering a thermal spray coating on the component, the component can be placed into a desiccator or dry-box.

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