Extended surface parallel coating inspection method

Details Extended surface parallel coating inspection method Extended surface parallel coating inspection method

2006-03-21

2006-03-21

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500, C356S630000

Reexamination Certificate

active

07016030

ABSTRACT:
Techniques for rapidly characterizing reflective surfaces and especially multi-layer EUV reflective surfaces of optical components involve illuminating the entire reflective surface instantaneously and detecting the image far field. The technique provides a mapping of points on the reflective surface to corresponding points on a detector, e.g., CCD. This obviates the need to scan a probe over the entire surface of the optical component. The reflective surface can be flat, convex, or concave.

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