Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1995-06-07
1996-12-17
Wojciechowicz, Edward
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257316, 257335, 257336, 257344, 257395, 257401, 257408, H01L 2976
Patent
active
055856608
ABSTRACT:
A high voltage PMOS or NMOS transistor 7 has improved on-resistance by truncating gate field oxide 43 so that drain region 42 may be implanted closer to channel region 49 than possible otherwise. By shortening the physical distance d2 between drain 42 and channel region 49, the drain to source on-resistance of the high voltage device is reduced and the performance of high voltage device 7 is thereby improved.
REFERENCES:
patent: 5246870 (1993-09-01), Merchant
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Zahr Parpia and C. A. T. Salama, "Optimization of Resurf LDMOS Transistors: An Analytical Approach," IEEE Transactions on Electron Devices, vol. 37, No. 3, Mar. 1990.
Taylor Efland, et al, "An Optimized Resurf LDMOS Power Device Module Compatible with Advanced Logic Processes," Texas Instruments Incorporated, Dec. 1992.
Professor B. Jayant Baliga, "Smart Power Technology: An Elephantine Opportunity" (Invited Plenary Session Paper), IEDM 90-3, 1990 IEEE, pp. 1.1.1-1.1.4. no month.
Habekotte, et al., "A Coplanar CMOS Power Switch," IEEE J. Solid-State Circuits, vol. SC-16, pp. 212-226, Jun. 1981.
J. A. Appeals and H. JM. J. Vaes, High Voltage Thin Layer Devices (Resurf Devices), IEDM Proceedings 1979, pp. 238-241. no month.
Kesterson James C.
Laws Gerald E.
McClure C. Alan
Texas Instruments Incorporated
Wojciechowicz Edward
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