Exposure of photo resist

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

156901, 430 5, 430313, C23F 102, B44C 122, C03C 1500, C03C 2506

Patent

active

045390703

ABSTRACT:
A method and apparatus for limiting the interference caused by shadows of minute particles of opaque matter that settles on the surface of an assembly of a metal substrate, a resist and an overlay by placing a second glass overlay on top of the assembly to raise the surface to a level where the shadows of any particles resting there will be diffused.

REFERENCES:
patent: 4413051 (1983-11-01), Thomas
patent: 4465759 (1984-08-01), Duly et al.
patent: 4499162 (1985-02-01), Banks et al.

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