Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1985-02-26
1986-08-19
Kittle, John
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430394, 430494, 313639, 355 53, 355 67, G03C 500, G03B 2754
Patent
active
046069976
ABSTRACT:
Through a pattern mask, small sections of a semiconductor wafer are exposed successively to light radiated from a mercury-vapor lamp in high-level steps, during each of which the power consumption of the mercury-vapor lamp is at a high level, by continuously lighting the mercury-vapor lamp and repeatedly alternating each of the high-level steps and a low-level step during which the power consumption of the mercury-vapor lamp is at a low level. As the mercury-vapor lamp, there is used a mercury-vapor lamp in which mercury is filled in such a large amount that when lit in the low-level step, the mercury vapor pressure in its envelope is below 96% of the saturated mercury vapor pressure at that time. Use of such a mercury-vapor lamp is effective in avoiding the occurrence of incomplete lighting state when its power consumption is changed from the low-level step to the high-level step.
REFERENCES:
patent: 4040736 (1977-08-01), Johannsmeier
patent: 4117375 (1978-09-01), Bachur et al.
patent: 4226522 (1980-10-01), Marshall
patent: 4226523 (1980-10-01), Ovshinsky et al.
Dees Jos,e G.
Kittle John
Ushio Denki Kabushiki Kaisha
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