Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-01-01
2008-01-01
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C355S077000
Reexamination Certificate
active
07315349
ABSTRACT:
Exposure equipment useful in the manufacture of semiconductor devices and a related method of operation are disclosed. The exposure equipment directs light through a reticle and an optical system positioned above a wafer onto a target portion of the wafer, and the wafer is rapidly transferred under the directed light to irradiate substantially the entire surface of the wafer. Recursive compensation for undesired movement of the reticle and optical system caused by the rapid transfer of the wafer is provided.
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English translation of JP 2001-15409 (dated Jan. 19, 2001) cited by Applicant in his IDS.
Mathews Alan
Samsung Electronics Co,. Ltd.
Volentine & Whitt PLLC
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